SPECIALITY GASES
Precision Gas Solutions for Advanced Industries
Greenox Gases delivers a comprehensive range of high purity packaged gases for industrial, medical, and specialty applications. Our solutions are engineered for safety, reliability, and efficiency, with flexible packaging options from cylinders to bulk supply.
Specialty gases are high-purity gases or custom gas mixtures that are manufactured and tested to meet strict quality standards. They are different from bulk or industrial gases because they are used in applications where accuracy, consistency, and purity are critical.
High-Purity & Ultra-High-Purity (UHP) Gases
Description: 99.999% to 99.99999% (7N) purity for critical applications.
|
Gas |
Purity Grades |
Key Applications |
Packaging |
|
Nitrogen |
5N to 7N |
Semiconductor annealing, LC-MS |
ISO tanks, cylinders |
|
Hydrogen |
5N to 6N |
Fuel cells, wafer processing |
Tube trailers/p> |
|
Oxygens |
5N |
Medical lasers, fiber optics |
Cylinder bundles |
Certifications: SEMI, ISO 14687, USP/EP
Rare & Noble Gases
Description:Ultra-pure rare gases for high-tech applications.
|
Gas |
Purity |
Applications |
Special Handling |
Xenon (Xe) |
99.999% |
Ion propulsion, medical imaging |
Stainless steel cylinders |
Krypton (Kr) |
99.995% |
Laser optics, insulation |
MoO₂ getters |
|
Neon (Ne) |
99.9995% |
High-voltage lighting, R&D |
Cryogenic adsorption |
Note: Custom purification available (e.g., O₂ < 0.1 ppm).
Calibration Gas Mixtures
Description: NIST-traceable blends for analytical instrumentation.
Mixture Type |
Components |
Accuracy |
Packaging |
Environmental (EPA) |
NOx/SO₂/CO in N₂ |
±1% NIST |
1L–50L cylinders |
Petrochemical |
C1–C6 in He/Ar |
±0.5% |
ISO 11114 valves |
Medical |
O₂/CO₂/N₂O balance |
±0.25% |
FDA-compliant |
Custom Blends: 100+ component mixtures available.
Reactive & Etching Gases
Description: High-purity corrosive gases for semiconductor and PV manufacturing.
Gas |
Purity |
Applications |
Safety Features |
Silane (SiH₄) |
99.9999% |
Solar cell deposition |
Double-contained cylinders |
Ammonia (NH₃) |
99.9995% |
LED epitaxy |
Passivated valves |
Chlorine (Cl₂) |
99.999% |
DRAM etching |
Nickel-plated stems |
Compliance: SEMI S2, OSHA Process Safety Management.
Specialty Gas Mixtures
Description: Tailored blends for unique industrial needs.
Mixture |
Composition |
Industries Served |
Laser Cutting |
F₂/He/Ar/O₂ |
Metal fabrication |
Breathable Air |
O₂ 20–22% in N₂ |
Diving, aerospace |
Refrigerant Blends |
R-404A/R-507A custom |
HVAC retrofits |
Custom Options: Dynamic/static blending with GC certification.
Isotope Gases
Description: Stable and radioactive isotopes for research.
Isotope |
Enrichment |
Applications |
¹⁸O Water |
95–99% |
PET tracer synthesis |
Deuterium |
99.8% |
NMR spectroscopy |
¹³CO₂ |
99% |
Climate research |
Regulatory: IAEA compliant shipments.
Packaging & Delivery
Format |
Capacity |
Pressure Range |
Special Features |
Specialty Cylinders |
1L–50L |
150–300 bar |
Electropolished interiors |
ISO Modules |
5,000–20,000L |
10–50 bar |
Inert gas blanket |
Microbulk |
100–500L |
200 bar |
Telemetry monitoring |
Industry Applications
Sector |
Use Cases |
Critical Gases |
Semiconductor |
Etching, deposition, purge |
SiH₄, NF₃, HF/He blends |
Pharma/Biotech |
Sterilization, lyophilization |
EO, CO₂/N₂ mixes |
Energy |
Battery R&D, fusion experiments |
D₂, T₂, He-3 |
Automotive |
Emissions testing, fuel cell R&D |
H₂/CO/NOx calibrants |
Why Choose Our Bulk Gas Supply?
✓ Global Purity Standards: ISO 17025, NIST-traceable
✓ Bespoke Solutions: Custom blends, valve configurations
✓ Safety First: DOT/ADR-compliant packaging
✓ Technical Support: Gas compatibility consulting