Electronics
Electronics & Semiconductor Solutions by Greenox Gases
Ultra-High Purity Gas Technologies for Chip Manufacturing
Greenox Gases delivers contamination-free gas systems engineered for semiconductor fabrication, display production, and microelectronics assembly.
Core Semiconductor Gas Products
The electronics industry depends on UHP industrial gases and specialty gases like N₂, O₂, H₂, Ar, He, CO₂, NH₃, and silane-based gases for semiconductor fabrication, displays, solar panels, LEDs, and batteries, making gases essential to modern technology.
1. Process Gases
Bulk Specialties:
- Nitrogen (99.99999%)
- Hydrogen (99.99995%)
- Argon (99.9999%)
Etching/Deposition:
- Fluorine (99.99%)
- Silane (99.9999%)
- Tungsten Hexafluoride
2. Specialty Gas Mixtures
- Doping Gases: Arsine, Phosphine, Boron Trifluoride
- Chamber Cleans: NF₃, C₂F₆, SF₆
- Carrier Gases: Ultra-dry helium/hydrogen blends
3. Purification & Delivery
Point-of-Use Purifiers:
- Oxygen/Moisture (<0.1 ppb)
- Hydrocarbon (<0.05 ppb)
Gas Distribution:
- 316L EP stainless steel
- VCR/VCO face-seal fittings
Application-Specific Solutions
Wafer Fabrication:
- Lithography chamber purges
- Epitaxial growth atmospheres
- Plasma etch gas formulations
Flat Panel Display:
- Chemical vapor deposition
- Laser annealing mixes
- OLED encapsulation gases
Assembly & Packaging:
- Die attach protection
- Hermetic sealing
- Thermal interface materials
Analytical Instrumentation:
- GC/MS carrier gases
- Leak detection standards
- ICP calibration mixes
Semiconductor-Grade Supply Matrix
Bulk N₂ 7N O₂ <0.1 ppm Pipeline H₂ 6N5 H₂O <0.5 ppb Cylinder bundles SiH₄ 5N5 Particles <0.1μm SDS cabinets CMP O₂ 6N THC <5 ppb Purified distribution
| Gas | Purity | Impurity Control | Packaging |
|---|---|---|---|
| Bulk N₂ | 7N | O₂ <0.1 ppm | Pipeline |
| H₂ | 6N5 | H₂O <0.5 ppb | Cylinder bundles |
| SiH₄ | 5N5 | Particles <0.1μm | SDS cabinets |
| CMP O₂ | 6N | THC <5 ppb | Purified distribution |
