Solar

Solar Energy Solutions by Greenox Gases
Advanced Gas Technologies for Photovoltaic Manufacturing & Energy Storage
Greenox Gases delivers precision-engineered gas solutions that enhance solar panel production efficiency, improve energy storage performance, and support next-generation photovoltaic technologies.

The solar industry uses gases like SiH₄, N₂, O₂, H₂, Ar, He, NH₃, CO₂, NF₃, SF₆, HF for wafer manufacturing, thin-film deposition, doping, passivation, coatings, cleaning, and leak detection, making them essential to high-efficiency solar panels.

Core Solar Manufacturing Solutions

1. Silicon Material Production

Polysilicon Refinement:

Ultra-pure hydrogen (99.99995%) for Siemens process
High-purity chlorine (99.999%) for trichlorosilane synthesis
Argon blanket gases (99.9999%) for crystal growth

2. Wafer & Cell Fabrication

Crystal Growth Atmospheres:

Controlled oxygen/nitrogen mixes for furnaces
Dopant gases for p-type/n-type silicon

Surface Treatment:

Texturing etch gases
Anti-reflective coating precursors

3. Thin Film Deposition

PECVD Processes:

Silane mixtures (99.9999%)
Ammonia-based nitride formulations

Sputtering:

Reactive oxygen/nitrogen for TCO layers
High-density plasma gases

Solar Module Production Support

1. Encapsulation & Lamination

Nitrogen purge systems (99.999%) for EVA curing
Moisture-control atmospheres for back sheet sealing

2. Frame Assembly

Laser welding gas mixtures
Aluminum anodizing protection gases

3. Quality Testing

Electroluminescence inspection environments
PID testing atmospheres

Energy Storage Integration

1. Battery Production

Dry room atmosphere control (-50°C dew point)
Electrolyte filling environments
Cell sealing gases

2. Hydrogen Solutions

Electrolyzer gases for solar-to-hydrogen
Fuel cell testing mixtures

Solar-Grade Gas Specifications

Application	Gas Type	Purity	Key Parameter
Ingot Growth	Argon	99.9999%	O₂ <0.5 ppm
Diffusion	POCl₃	99.999%	Metal ions <1 ppb
PECVD	SiH₄/NH₃	99.9995%	Particles <0.1μm
Lamination	N₂	99.999%	H₂O <3 ppm